Characterization of Layer Stacks in Microelectronic Products: Challenges to Sample Preparation and TEM Analysis
Autoren |
Hans-Jürgen Engelmann |
|---|---|
Medien | Practical Metallography |
Veröffentlichungsjahr | 2001 |
Band | 2001/38 |
Heft | 8 |
Veröffentlichungsart | Zeitschriften-/Journalbeitrag (peer-reviewed) |
DOI | |
Zitierung | Zschech, E.; Engelmann, Hans-Jürgen; Saage, Holger; deRobillard, Quentin; Stegmann, H. (2001): Characterization of Layer Stacks in Microelectronic Products: Challenges to Sample Preparation and TEM Analysis. Practical Metallography 2001/38 (8). DOI: 10.1515/pm-2001-380803 |
Peer Reviewed | Ja |